اثر شخصی, based on https://patents.google.com/patent/US20200088585A1

The design of the beams in patent US20200088585A1 is within what can be considered "state of the art" and/or a good representation of the principle.

Notes on comparison:

• https://www.semanticscholar.org/paper/DESIGN-AND-SIMULATION-OF-MICRO-BOLOMETER-IN-MEMS-A-Brn%C4%9B-Pr%C3%A1ce/92d86165fd05f900e6240b02f41a1d255685502d
• https://www.researchgate.net/figure/Left-Schematic-of-microbolometer-FPA-element-Microelectromechanical-systems-MEMS_fig2_258715639
• https://www.coventor.com/blog/are-mems-bolometers-the-next-big-thing/
• https://link.springer.com/article/10.1007/s00542-020-05192-y figure 2 shows various beam lengths
• https://www.researchgate.net/figure/Schematic-of-the-amorphous-silicon-microbolometer-pixel_fig1_253764411
• https://www.mdpi.com/1424-8220/18/8/2593/htm
• https://pdfs.semanticscholar.org/33ef/5ce91c9fb89aa330b1f06646ae3e4f63c683.pdf
• http://micromachine.stanford.edu/~yoneoka/research/bolometer.html

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